Vacuum Pump Oils

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Vacuum Pump Oils

NEOVAC is well-known as a synonym for high quality vacuum pump oil. We have received endorsements of NEOVAC as the oil used by many vacuum pump manufacturers due to the high level of trust placed in NEOVAC's performance. NEOVAC is used in vacuum equipment in applications such as semiconductors, silicon wafers, vacuum deposition, heat treatment, and packaging and contributes to productivity improvements.

Vacuum Pump Oils | NEOVAC MR Series

Rotary pump vacuum oil is used with the purposes of lubrication and the preservation of airtight seals. It has a low steam pressure, suitable viscosity, and is difficult to emulsify (it has anti-emulsification properties). In other words, it easily separates from water and removes water.

Product No.	kinematic viscosity mm2/s (40℃)	Flash point ℃	Merit & Use	Color(ASTM)	Vapor pressure Pa(Torr) (50℃)	Product Information
MR-100	44.6	230	Standard for small pump.	L0.5	1.3X10-2 or less (1X10-4）
MR-200	71	256	Standard for small pump.	L0.5	1.3X10-3 or less (1X10-5）
MR-250	105	270	Standard for small pump.	1	1.3X10-3 or less (1X10-5）
MR-200A	71	252	Improved heat and oxidation. Moisture suction is supported.	L0.5	1.3X10-3 or less (1X10-5）
MR-250A	105	270	Improved heat and oxidation. Moisture suction is supported. For large pump.	L1.5	1.3X10-3 or less (1X10-5）

Vacuum Pump Oils | NEOVAC SX & SY

Diffusion pump vacuum oil is sprayed either as molecules or as a steam and is used to obtain a vacuum state. It is necessary for these oils to be chemically stable such as by having low steam pressures, by not being transformed due to heat (heat resistance), and by not reacting easily with oxygen (oxidation resistance).

Product No.	kinematic viscosity mm2/s (40℃)	Mean Molecular Weight	Flash point ℃	Merit & Use	Vapor pressure Pa(Torr) (25℃)	Ulrimate pressure	Product Information
SX		約394	235	For surface treatment equipment. (vapor deposition, sputter, heat treatment)	7X10-6 or less (5X10-8）
SY		約422	250	For surface treatment equipment. (vapor deposition, sputter, heat treatment)	1X10-6 or less (1X10-8）